1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 a吸附d均降r均升p逆放v抽真空f 终升
1a a a a a a d1 d1 d2 d3 p v v r3 r2 r1 r1 f
2r1 r1 f a a a a a a d1 d1 d2 d3 p v v r3 r2
3 a a a a a a
4 a a a a a a
5 a a a a a a
6a a a a a a
我也发一个6-2-3流程时序图
状态
T1 T2 T3 T1 T2 T3 T1 T2 T3 T1 T2 T3 T1 T2 T3 T1 T2 T3
T001A A A A A A A P 1D 2D/3D D D V V V /3R 2R 1R /FR
T001B 2R 1R /FR A A A A A A P 1D 2D/3D D D V V V /3R
T001C V V /3R 2R 1R /FR A A A A A A P 1D 2D/3D D D V
T001D D D V V V /3R 2R 1R /FR A A A A A A P 1D 2D/3D
T001E P 1D 2D/3D D D V V V /3R 2R 1R /FR A A A A A A
T001F A A A P 1D 2D/3D D D V V V /3R 2R 1R /FR A A A