多晶硅现有工艺概述 英文版
我自己也查了,可是没找到,大家有谁可以帮帮我static/image/smiley/default/cry.gif
我就有几篇,
Bathey, B.R. and M.C. Cretella, Solar grade silicon. Journal of Materials Science, 1982. 17: p. 3077-3096 算比较好的综述
CIFTJA, A., T.A. ENGH, and M. TANGSTAD, Refining and Recycling of Silicon A Review. 2008
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